Evaluation of Surface Damage of Pd Using Cross-Sectional Electron Backscatter Diffraction Analysis

Surface damage induced by mechanical polishing of cold-rolled and annealed Pd specimens was examined cross-sectional electron backscatter diffraction (EBSD) measurements. Fine grains with high-angle grain boundaries were detected in the outermost layer both specimens. Less granular but layered gradation crystallographic orientation sub-surface specimen. In specimen, a lot elongated entire inner layer. The formation seemed to be prevented specimen pre-introduced microstructures. depth surface dependent on matrix grain. This study clearly demonstrated application EBSD analysis for evaluating metallic materials.